Semiconductor Process Fundamentals (SP41)  Technical Certificate of Credit

This course overviews basic material properties as well as environment, health, and safety (EHS) issues in equipment operation and materials handling in top down and bottom up nano scale and semiconductor fabrication. The chemical and physical materials properties underlying nanotechnology are surveyed. EHS topics arising from the processing and disposal of these materials are addressed including cleanroom operation, OSHA lab standard safety training, health issues, biosafety levels (BSL) guidelines, and environmental concerns. Specific safety issues dealing with equipment, materials, and processing will also be discussed including those pertinent to wet benches, thermal processing tools, plasma-based equipment, optical, e-beam, stamping and embossing lithography tools, vacuum systems and pumps, gas delivery systems and toxic substance handling and detection.

This course is an overview of the semiconductor and nanotechnology production and tailoring of the materials used in nanofabrication. It covers the essential foundations required to understand the operation of semiconductor devices such as transistors, diodes, solar cells, light-emitting devices, and more.The course will cover semiconductors and nanomaterials processing, including modules on the basics of silicon manufacturing backend chip processing, integration into electronics and high technology applications. The course will include tours of actual semiconductor and electronics manufacturing facilities industry as well as thin film and materials laboratories at local universities. It will also cover physical and chemical vapor deposition techniques such as sputtering, oxidation, and thermal and electron beam evaporation. The course gives students experience in producing a wide variety of materials tailored for their mechanical, electrical, optical, magnetic, and biological properties.

A study and hands-on exposure to the processes, materials, and equipment used in the manufacturing of semiconductors, including an overview of the semiconductor industry, related terminology, and standard safety practice. Techniques to dope semiconductor materials such as implantation and diffusion could be covered. Fabrication and patterning techniques such as photolithography and e-beam lithography could be covered.