Safety and Equipment Overview for Nanotechnology a NSMT 1000

This course overviews basic material properties as well as environment, health, and safety (EHS) issues in equipment
operation and materials handling in top down and bottom up nano scale and semiconductor fabrication. The chemical
and physical materials properties underlying nanotechnology are surveyed. EHS topics arising from the processing and
disposal of these materials are addressed including cleanroom operation, OSHA lab standard safety training, health
issues, biosafety levels (BSL) guidelines, and environmental concerns. Specific safety issues dealing with equipment,
materials, and processing will also be discussed including those pertinent to wet benches, thermal processing tools,
plasma-based equipment, optical, e-beam, stamping and embossing lithography tools, vacuum systems and pumps, gas
delivery systems and toxic substance handling and detection.

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