Nanofabrication and Characterization Processes NSMT 1040

This course is designed to train the student in the practical and theoretical aspects of the semiconductor and nano device
manufacturing process. Material modifications to meet these requirements will be addressed including structure control,
composition control, surface property control, strain control, functionalization, and doping. This course examines a variety
of techniques and measurements essential for testing and for controlling material fabrication and final device
performance. The characterization experience will include hands-on use of tools such as the Atomic Force Microscope
(AFM), Scanning Electron Microscope (SEM), 1 nm resolution field emission SEM, fluorescence microscopes, and
Fourier transform infrared spectroscopy.

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